ANSYS > Case Studies > SilMach: Enhancing MEMS Device Efficiency with ANSYS Multiphysics

SilMach: Enhancing MEMS Device Efficiency with ANSYS Multiphysics

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Technology Category
  • Sensors - Accelerometers
  • Sensors - Acoustic Sensors
Applicable Industries
  • Electronics
  • Equipment & Machinery
Applicable Functions
  • Product Research & Development
Use Cases
  • Virtual Prototyping & Product Testing
  • Virtual Reality
Services
  • Hardware Design & Engineering Services
About The Customer
SilMach is a spin-off from the LMARC/IMFC based in Besançon, France. As a young MEMS design, simulation, and prototyping R&D company, SilMach's core skills include MEMS technologies for new electromechanical devices combined with electronic circuits. The company's mission is to provide MEMS R&D dedicated to the conceptualization, design, simulation, and prototyping of highly integrated silicon-based actuators and systems. SilMach is committed to creating more efficient MEMS devices and continuing to research advanced topics in the field.
The Challenge
SilMach, a young MEMS (Micro-Electro-Mechanical Systems) design, simulation, and prototyping R&D company based in Besançon, France, faced a significant challenge in the development of their products. The prototyping of MEMS devices is an expensive process, necessitating accurate simulation before manufacturing to ensure the devices perform as designed. The complexity of these devices requires sophisticated coupled physics analysis tools for accurate prediction of their performance. The challenge was to find a solution that could handle the intricate physics involved in creating sensors and actuators within arrays and predict their performance before committing to manufacture.
The Solution
SilMach found their solution in ANSYS Multiphysics, a tool that allowed them to solve complex coupled physics problems. This tool enabled them to create sensors and actuators within arrays and predict their performance before manufacturing. ANSYS Multiphysics allowed SilMach to handle coupled physics such as mechanical deformation and nonlinear contact effects with acoustic, electrostatic, thermal, and fluid damping. This comprehensive solution provided SilMach with the ability to accurately simulate their MEMS devices, ensuring their performance before the costly process of prototyping began. The use of ANSYS Multiphysics has not only improved the efficiency of their devices but also allowed them to continue researching advanced topics.
Operational Impact
  • The use of ANSYS Multiphysics has had a profound impact on SilMach's operations. The ability to accurately simulate the performance of their MEMS devices before manufacturing has not only saved costs but also improved the efficiency of their devices. Furthermore, the tool has allowed SilMach to continue researching advanced topics, such as MEMS-based gas microturbines, MEMS-based flap arrays for active control of turbulence, and flapping wing propulsion systems for artificial insects and nanometer scale UAVs. This has expanded the company's capabilities and potential for innovation in the field of MEMS technologies.
Quantitative Benefit
  • ANSYS Multiphysics enabled SilMach to create MEMS devices that are significantly more efficient, with a conventional electromagnetic actuator producing 100 Watts per gram compared to 1 Watt/g for standard devices.

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